JPH0425101Y2 - - Google Patents

Info

Publication number
JPH0425101Y2
JPH0425101Y2 JP19174785U JP19174785U JPH0425101Y2 JP H0425101 Y2 JPH0425101 Y2 JP H0425101Y2 JP 19174785 U JP19174785 U JP 19174785U JP 19174785 U JP19174785 U JP 19174785U JP H0425101 Y2 JPH0425101 Y2 JP H0425101Y2
Authority
JP
Japan
Prior art keywords
pad
rotary
rotary pad
screw
pad support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19174785U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62100152U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19174785U priority Critical patent/JPH0425101Y2/ja
Publication of JPS62100152U publication Critical patent/JPS62100152U/ja
Application granted granted Critical
Publication of JPH0425101Y2 publication Critical patent/JPH0425101Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
JP19174785U 1985-12-13 1985-12-13 Expired JPH0425101Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19174785U JPH0425101Y2 (en]) 1985-12-13 1985-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19174785U JPH0425101Y2 (en]) 1985-12-13 1985-12-13

Publications (2)

Publication Number Publication Date
JPS62100152U JPS62100152U (en]) 1987-06-25
JPH0425101Y2 true JPH0425101Y2 (en]) 1992-06-15

Family

ID=31146176

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19174785U Expired JPH0425101Y2 (en]) 1985-12-13 1985-12-13

Country Status (1)

Country Link
JP (1) JPH0425101Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6058097B1 (ja) * 2015-09-16 2017-01-11 株式会社エーエス 床磨機

Also Published As

Publication number Publication date
JPS62100152U (en]) 1987-06-25

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